An investigation on suction force of vacuum pumps for micro-components
نویسندگان
چکیده
The e!ect of air viscosity on suction force of vacuum pumps for holding micro-components was investigated. The experimental data show that suction force micro-components is much larger than the calculated results without considering in#uence of the lower pressure between the suction plate and the micro-component. According to the dimensional analysis, a theoretical formula of suction force was derived, and then the optimization of aperture dimension of suction plates was discussed. ( 2000 Elsevier Science Ltd. All rights reserved.
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